In most case plasma treatment do not require the use of toxic substance. The plasma gases used are usually air, Nitrogen or Argon. A few percent of reactive gases such as H2 or O2 is sometimes added. In the case of plasma polymerization a precursor molecule is added to the plasma gas. Specific care must be taken depending on the precursor molecule used.
Plasma processes takes place at room temperature. Therefore energy is not wasted by using heating or cooling systems. The low temperature of the plasma phase also allows the treatment of temperature sensitive substrate.